Germanium(IV) fluoride

  • Germanium tetrafluoride
  • Tetrafluorogermane
Formula
GeF4
Structure
Description
Colorless gas with a pungent, garlic-like odor.
Uses
Semiconductor process gas.

Registry Numbers and Inventories.
CAS
7783-58-6
EC (EINECS/ELINCS)
232-011-3
UN (DOT)
3304
Merck
12,4419
Canada DSL/NDSL
NDSL
US TSCA
Listed
Japan ENCS (MITI)
Listed
Korea ECL
Listed

Properties.
Formula
F4Ge
Formula mass
148.6
Melting point, °C
-15 C (4 atm)
Boiling point, °C
-37 (1 atm)
Vapor pressure, mmHg
3030 (-15 C)
Solubility in water
Reacts
Partition coefficient, pKow
6.30

Hazards and Protection.
Storage
Store and use with adequate ventilation. Firmly secure cylinders upright to keep them from falling or being knocked over. Screw valve protection cap firmly in place by hand. Store only where temperature will not exceed 52 C. Store full and empty cylinders separately. Use a first-in, first-out inventory system to prevent storing full cylinders for long periods.
Protection
Wear work gloves for cylinder handling; neoprene, natural rubber, or nitrile gloves when changing out cylinders or wherever contact with product could occur. Wear safety glasses when handling cylinders; vapor-proof goggles or face mask during cylinder changeout or wherever contact with product could occur. Select per OSHA 29 CFR 1910.133. Metatarsal shoes for cylinder handling. Protective clothing where needed.
Respirators
A positive-pressure, air-supplied, full-face, self-contained breathing apparatus is required for any work where exposure to product could occur. Select per OSHA 29 CFR 1910.134 and ANSI Z88.2.
Small spills/leaks
Evacuate all personnel from danger area. Reverse flow into cylinders may cause rupture. Do not approach area without self-contained breathing apparatus and full protective clothing. Reduce vapors with fog or fine water spray. Shut off leak if without risk. Ventilate area of leak or move cylinder to a well-ventilated area. Contain spills in protected areas; prevent runoff from exposing personnel to liquid and vapors and contaminating the surrounding environment. Poisonous, corrosive vapors may spread from spill. Before entering area, especially a confined area, check atmosphere with an appropriate device.
Stability
Stable if stored as directed.
Incompatibilities
Waterr, alkali metals, alkaline metal earths, calcium oxide, organic materials, silica materials.
Decomposition
Hydrogen fluoride, fluorogermanic acids.

Fire.
Fire fighting
Use media appropriate for surrounding fire. Evacuate all personnel from danger area. Do not approach area without self-contained breathing apparatus and protective clothing. Immediately cool cylinders with water spray from maximum distance. Remove ignition sources if without risk. If cylinders are leaking, reduce toxic vapors with water spray or fog. Stop flow of gas if without risk, while continuing cooling water spray. Remove all cylinders from area of fire if without risk. Reverse flow into cylinders may cause rupture. (See section 16.) On-site fire brigades must comply with OSHA 29 CFR 1910.156.
Fire potential
Not flammable.
Hazards
Toxic, corrosive high-pressure gas. Reacts with water to form hydrogen fluoride fumes. Heat of fire can build pressure in cylinder and cause it to rupture. No part of cylinder should be subjected to a temperature higher than 125F (52C). Germanium tetrafluoride cylinders are equipped with a pressure relief device designed to relieve pressure at elevated temperature. (Exceptions may exist where authorized by DOT.) Reverse flow into cylinder may cause rupture. Vapors are extremely irritating; contact my burn the skin and eyes.
Health
4
 
Flammability
0
 
 
Reactivity
1
 

Health.
Exposure effects
Prolonged or repeated exposure may decalcify the bones and cause nasal congestion, bronchitis, weight loss, anemia, weakness, and stiffness of joints. Dental fluorosis (mottling of the teeth) may occur. Repeated overexposure may also damage the lungs, liver, kidneys, heart, and blood.
   Ingestion
This product is a gas at normal temperature and pressure.
   Inhalation
Harmful or fatal if inhaled. Extremely irritating to mucous membranes and respiratory tract. Causes throat irritation, coughing, shortness of breath, excessive salivation, headache, vertigo, chills, nausea, abdominal pain, and vomiting. May cause bronchial spasms, chemical pneumonia, and pulmonary edema (fluid in the lungs). May damage the lungs, liver, kidneys, heart, and blood. Symptoms may be delayed.
   Skin
Germanium tetrafluoride causes chemical burns. Skin burns may result in absorption of potentially harmful amounts of material. Symptoms may be delayed.
   Eyes
Germanium tetrafluoride burns eye tissue.

First aid
 
   Ingestion
A highly unlikely route of exposure. This product is a gas at normal temperature and pressure.
   Inhalation
In any case of exposure to germanium tetrafluoride, always assume that some inhalation has occurred. Seek immediate emergency medical assistance. Remove to fresh air. If not breathing, give artificial respiration. If breathing is difficult, qualified personnel may give oxygen. Keep victim warm. Seek immediate emergency medical assistance.
   Skin
Immediately flush affected area with large quantities of cool water while removing contaminated clothing and shoes. Seek immediate emergency medical assistance. Continue washing in cool water for at least 15 minutes or until medical assistance arrives. Discard contaminated clothing and shoes.
   Eyes
Immediately flush eyes thoroughly with water until emergency medical assistance arrives, but for at least 30 minutes. Hold the eyelids open and away from the eyeballs to ensure that all surfaces are flushed thoroughly. Seek immediate emergency medical assistance. See a physician, preferably an ophthalmologist.

Transport.
UN number
3304
Response guide
Hazard class
2.3