- Tetramethyl silicane
A colorless, mildly acidic volatile liquid.
Used for PECVD of low k dielectric and barrier layers in damascene metallization applications.
Registry Numbers and Inventories.
S 9 16 33
Swiss Giftliste 1
Japan ENCS (MITI)
Melting point, °C
Boiling point, °C
Vapor pressure, mmHg
589 (20 C)
Vapor density (air=1)
0.642 g/cm33 (20 C)
Solubility in water
12.85 g/s2 (20 C)
1.3587 (20 C)
Heat of fusion
Heat of vaporization
Heat of combustion
Hazards and Protection.
Keep away from heat, sparks, and flame. Keep away from sources of ignition. Store in a tightly closed container. Storage under a nitrogen blanket has been recommended.
Wash thoroughly after handling. Use only in a well ventilated area. Ground and bond containers when transferring material. Avoid contact with eyes, skin, and clothing. Empty containers retain product residue, (liquid and/or vapor), and can be dangerous. Take precautionary measures against static discharges. Avoid contact with heat, sparks and flame. Avoid ingestion and inhalation. Do not pressurize, cut, weld, braze, solder, drill, grind, or expose empty containers to heat, sparks or open flames.
Eyes: Wear appropriate protective eyeglasses or chemical safety goggles as described by OSHA's eye and face protection regulations in 29 CFR 1910.133 or European Standard EN166. Skin: Wear appropriate protective gloves to prevent skin exposure. Clothing: Wear appropriate protective clothing to prevent skin exposure.
Follow the OSHA respirator regulations found in 29CFR 1910.134 or European Standard EN 149. Always use a NIOSH or European Standard EN 149 approved respirator when necessary.
Absorb spill with inert material, (e.g., dry sand or earth), then place into a chemical waste container. Remove all sources of ignition. Provide ventilation.
Stable under normal temperatures and pressures. May ignite spontaneously in air by slightly elevating the temperature or lowering the pressure.
Strong acids, strong bases, strong oxidizing agents, chlorine.
Carbon monoxide, carbon dioxide, silicon oxide.
Upper exp. limit, %
Lower exp. limit, %
Do not extinguish fire unless flow can be stopped. Use water in flooding quantities as fog. Solid streams of water may spread fire. Cool all affected containers with flooding quantities of water. Apply water from as far a distance as possible. Use foam, dry chemical, or carbon dioxide.
Vapors may form explosive mixtures with air. Vapors may travel to source of ignition and flash back. Most vapors are heavier than air. They will spread along ground and collect in low or confined areas (sewers, basements, tanks). Vapor explosion hazard indoors, outdoors or in sewers. May polymerize explosively when heated or involved in a fire. Runoff to sewer may create fire or explosion hazard. Containers may explode when heated. Many liquids are lighter than water.
Fire will produce irritating, corrosive and/or toxic gases.
The toxological properties of this substance have not been fully investigated.
May cause irritation of the digestive tract. The toxicological properties of this substance have not been fully investigated.
May cause respiratory tract irritation. The toxicological properties of this substance have not been fully investigated.
May cause skin irritation.
May cause eye irritation.
If victim is conscious and alert, give 2-4 cupfuls of milk or water. Never give anything by mouth to an unconscious person. Get medical aid immediately.
Remove from exposure to fresh air immediately. If not breathing, give artificial respiration. If breathing is difficult, give oxygen. Get medical aid.
Get medical aid. Flush skin with plenty of soap and water for at least 15 minutes while removing contaminated clothing and shoes.
Flush eyes with plenty of water for at least 15 minutes, occasionally lifting the upper and lower eyelids. Get medical aid immediately.
2931 00 95
Std. Transport #